Nano/Micro Optical, Electrical and Mechanical Systems on Silicon Chips and Integrated Circuits | Research Capability & Technology Portfolio

Design, fabrication and measurement of nano- and micro-scale systems with mechanical, electrical and/or optical functionalities on a silicon substrate or CMOS integrated circuit, enabling the development of novel and advanced sensors and actuators.

Competitive advantage

A suite of novel patent-protected technologies, which include:

High aspect ratio sharp nanotips — CMOS compatible and integration with nano-scale devices at unprecedented density, not possible with any other technology
PZT microlens micro-actuators — record-breaking large displacement and resonance frequency and small footprint micro-lens piezoelectric actuators for micro-optics application
Low thermal budget polysilicon films — thick and low stress silicon film with low thermal budget suitable for microelectromechanical systems (MEMS) formation on top of CMOS
Delivering record-breaking high gauge factor piezo-resistive polysilicon films with low thermal budget

Impact

New devices for next-generation electronics

Capabilities and facilities

Advanced semiconductor manufacturing tools in ANFF at UNSW and other nodes around Australia
Mark Wainwright Analytical Centre (MWAC) for process monitoring, diagnostic and film characterisation
MEMS measurement lab equipped with Polytech MSA-500, providing the capability to measure dynamics of nano/micro structures with sub-nanometre displacement resolution
Silicon photonics characterisation optical bench set-up with automatic nano-positioners, deterministic polarisation controller, and 7.5 GHz spectrum analyser